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Browsing 2010 - FMTÜ XV. sz. by Author "Biró, Dominic"

Browsing 2010 - FMTÜ XV. sz. by Author "Biró, Dominic"

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  • Papp, Sándor; Jakab-Farkas, László; Biró, Dominic (Erdélyi Múzeum-Egyesület, 2010)
    Abstract Automatic control of reactive sputtering process involves diagnosing electrical discharge plasma state and the definition of control variables. Optical intensity of characteristic radiation emitted by sputtered ...

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